Wafer edge with light sensor

Details Wafer edge with light sensor Wafer edge with light sensor

2007-06-26

2007-06-26

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S221000, C250S227110, C356S622000, C901S030000

Reexamination Certificate

active

10439393

ABSTRACT:
An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system comprises a receiving member that is coupled to an end effector and a light sensor that is operatively coupled to the receiving member and is configured to detect an amount light transmitted by the receiving member. In a modified embodiment, the apparatus also includes a transmitting member that receives light from a light source and is also coupled to the end effector.

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