4. Valves and valve actuation
  5. Pivoted valves

Richard Crabb

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Chemical vapor deposition system

Valves and valve actuation – Pivoted valves
Patent

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Chemical vapor desposition system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Method for loading a substrate into a GVD apparatus

Material or article handling – Apparatus for moving intersupporting articles into – within,... – Stack forming apparatus
Patent

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Semiconductor handling robot with improved paddle-type end...

Material or article handling – Process – Of material charging or discharging of a chamber of a type...
Reexamination Certificate

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Semiconductor handling robot with improved paddle-type end...

Material or article handling – Process – Of charging load-holding or -supporting element from source...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-184439

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