Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Reexamination Certificate
2007-08-14
2007-08-14
Gravini, S. (Department: 3749)
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
Reexamination Certificate
active
11395893
ABSTRACT:
An edge wheel for supporting and rotating a disk-shaped substrate includes a wheel body having a peripheral groove configured to support an edge of a substrate and at least one radial channel extending into said wheel body from said peripheral groove. An edge wheel dryer and a method for processing a disk-shaped substrate are also described.
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Gravini S.
Lam Research Corporation
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