4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

John Parks

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Apparatus and method for depositing low K dielectric materials

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Atmospheric substrate processing apparatus for depositing...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Chamber for high-pressure wafer processing and method for...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Chamber for wafer cleaning and method for making the same

Cleaning and liquid contact with solids – Apparatus – With spray or jet supplying and/or applying means
Reexamination Certificate

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Chamber for wafer cleaning and method for making the same

Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2080465

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