Wafer edge wheel with drying function

Details Wafer edge wheel with drying function Wafer edge wheel with drying function

2006-08-15

2006-08-15

Gravini, S. (Department: 3749)

Drying and gas or vapor contact with solids

Process

With nondrying treating of material

Reexamination Certificate

active

07089687

ABSTRACT:
An edge wheel for supporting and rotating a disk-shaped substrate includes a wheel body having a peripheral groove configured to support an edge of a substrate and at least one radial channel extending into said wheel body from said peripheral groove. An edge wheel dryer and a method for processing a disk-shaped substrate are also described.

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patent: 2006/0000494 (2006-01-01), Garcia et al.
U.S. Appl. No. 10/745,219, filed Dec. 22, 2003, Davis et al.
U.S. Appl. No. 10/882,934, filed Jun. 30, 2004, Garcia et al.

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