4. Pumps
  5. Condition responsive control of pump drive motor
  6. By control of electric or magnetic drive motor

Entegris, Inc.

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300 mm microenvironment pod with door on side

Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
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300 mm microenvironment pod with door on side

Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
Reissue Patent

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300MM single stackable film frame carrier

Special receptacle or package – For plate or sheet – Fragile or sensitive
Reexamination Certificate

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Apparatus for conditioning the temperature of a fluid

Heat exchange – With timer – programmer – time delay – or condition responsive... – Temperature responsive or control
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Atmospheric pressure microwave plasma treated porous membranes

Liquid purification or separation – Filter – Material
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