Vision system

Details Vision system Vision system

2006-12-28

2009-12-01

Tran, Khoi H. (Department: 3664)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Robot control

C700S258000, C700S259000, C318S568160, C318S625000, C250S559450, C348S086000, C348S087000, C348S094000

Reexamination Certificate

active

07627395

ABSTRACT:
A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.

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