Supports – Machinery support – Including vibration isolation means
Reexamination Certificate
2011-08-02
2011-08-02
Wood, Kimberly (Department: 3632)
Supports
Machinery support
Including vibration isolation means
C248S637000, C052S292000
Reexamination Certificate
active
07988122
ABSTRACT:
A vibration control pedestal and an installation method thereof are disclosed, including a method for reducing particles and vibrations while moving equipment, including semiconductor equipment, from one vibration control pedestal to another. The vibration control pedestal includes an equipment support body having at least two equipment support cells. A cell connection unit passes through side surfaces of the equipment support cells and connects the equipment support cells to each other. A bottom structure installed under the equipment support body braces the equipment support body.
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English language abstract of Japanese Publication No. 2000-170362.
English language abstract of Japanese Publication No. 2001-146812.
Heo Jung-Shik
Hwang Jung-sung
Kim Seok-Youn
Kwun Do-Hyun
Lee Ho-Young
Samsung Electronics Co,. Ltd.
Volentine & Whitt PLLC
Wood Kimberly
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