Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Non-single crystal – or recrystallized – material containing...
Patent
1996-01-23
1999-11-16
Monin, Donald
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Non-single crystal, or recrystallized, material containing...
257 66, 257347, 257350, H01L 31036, H01L 2904
Patent
active
059862866
ABSTRACT:
To provide a technology capable of promoting property of a thin film transistor formed on a glass substrate, a silicon oxide film 102 is formed on a glass substrate 101 and an amorphous silicon film 103 is formed thereon. A nickel acetate solution including nickel element that is a metal element promoting crystallization of silicon is coated and a water film 401 is formed. A state in which the nickel element is held in contact with the surface of the amorphous silicon film 103 is realized by performing spin drying. Uniform crystal growth is carried out as shown by arrow marks 104 by performing a heating treatment. An electrically inactive layer is formed by having nickel element having a high concentration which is present at front end portions of crystal growth react with an underlayer of the silicon oxide film 102. In this way the crystalline silicon film restraining the influence of nickel element can be provide.
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Miyanaga Akiharu
Teramoto Satoshi
Yamazaki Shunpei
Costellia Jeffrey L.
Ferguson Jr. Gerald J.
Monin Donald
Semiconductor Energy Laboratory Co,. Ltd.
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