Via offsetting to reduce stress under the first level...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead

Reexamination Certificate

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C257S773000, C257S774000

Reexamination Certificate

active

07812438

ABSTRACT:
The invention is directed to an improved microelectronics device that reduces BEOL delamination by reducing the tensile stress imposed on the via which connects first level interconnects with the BEOL. Tensile stress imposed on the via is reduced by shifting the via towards the center of a silicon chip or alternatively shifting the UBM towards the corners of the silicon chip.

REFERENCES:
patent: 5315485 (1994-05-01), Magill et al.
patent: 5784262 (1998-07-01), Sherman
patent: 6833615 (2004-12-01), Geng et al.
patent: 7208348 (2007-04-01), Geng et al.
patent: 2005/0128721 (2005-06-01), Tay et al.

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