Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-12-19
2006-12-19
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C073S105000
Reexamination Certificate
active
07151256
ABSTRACT:
Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. An apparatus includes a cantilever structure including a substrate including a cantilever body, that optionally includes a doped layer, and a vertically aligned nanostructure coupled to the cantilever body.
REFERENCES:
patent: 6159742 (2000-12-01), Lieber et al.
patent: 6649431 (2003-11-01), Merkulov et al.
patent: 6743408 (2004-06-01), Lieber et al.
patent: 2001/0051367 (2001-12-01), Kiang
patent: 2002/0084410 (2002-07-01), Colbert et al.
patent: 2002/0117951 (2002-08-01), Merkulov et al.
patent: 2003/0148577 (2003-08-01), Merkulov et al.
patent: 2004/0197909 (2004-10-01), McKnight et al.
“Scanning tunneling microscopy on rough surfaces: tip-shape-limited resolution” G. Reiss, J. Vancea, H. Wittmann, J. Zweck, and H. Hoffmann, J. Appl. Phys. 67, 1156 (1990).
“Scanning probe metrology” J. E. Griffith, D. A. Grigg, M. J. Vasile, P. E. Russell, and E. A. Fitzgerald J. Vac. Sci. Technol. A 10, 674 (1992).
“Characterization of scanning probe microscope tips for linewidth measurement” J. E. Griffith, D. A. Grigg, M. J. Vasile, P. E. Russell, and E. A. Fitzgerald, J. Vac. Sci. Technol. B 9, 3586 (1991).
“Scanning probe tip geometry optimized for metrology by focused ion beam ion milling” M. J. Vasile, D. Grigg, J. E. Griffith, E. Fitzgerald, and P. E. Russell J. Vac. Sci. Technol. B, 9, 3569 (1991).
“Scanning probe tips formed by focused ion beams” M. J. Vasile, D. A. Grigg, J. E. Griffith, E. A. Fitzgerald, and P. E. Russell, Rev. Sci. Instrum., 62, 2167 (1991).
“Formation of probe microscope tips in silicon by focused ion beams” M.J. Vasile, C. Biddick and H. Huggins. Appl. Phys. Lett., 64, 575 (1994).
“Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging” M. Wendel, H. Lorenz and J.P. Kotthaus, Appl/ Phys. Lett. 67, 3732 (1995).
“Mechanical properties of high-aspect-ratio atomic force microscope tips” G. Janchen, P. Hoffmann, A. Kriele, H. Lorenz, A.J. Kulik, and G. Dietler, Appl. Phys. Lett., 80, 4623 (2002).
“Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid” H. Nishijima, S. Kamo, S. Akita, Y. Nakayama, K.I. Hohmura, S.H. Yoshimura and K. Takeyasu, Appl. Phys. Lett. 74, 4061 (1999).
“WS2nanotubes as tips in scanning probe microscopy” A. Rothschild, S.R. Cohen, R. Tenne, Appl. Phys. Lett. 75, 4025 (1999).
“Growth and fabrication with single-walled carbon nanotube probe microscopy tips” C.L. Cheung, J.H. Hafner, T.W. Odom, K. Kim and C.M. Lieber, Appl. Phys. Lett, 76, 3136 (2000).
“Improved fabrication approach for carbon nanotube probe devices” R. Stevens, C. Nguyen, A. Cassel, L. Delzeit, M. Meyyappan and J. Han, Appl. Phys. Lett, 77, 3453 (2000).
“Carbon nanotube tip probes: stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors” C.V. Nguyen, K.J. Chao, R.M.D. Stevens, L. Delzeit and M. Meyyappan. Nanotechnology, 12, 363 (2001).
“Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy” E. Yenilmez, Q. Wang, R.J. Chen, D. Wang, and H. Dai, 80, 2225 (2002).
“Single-wall carbon nanotube atomic force microscope probes” E.S. Snow, P.M. Campbell and J.P. Novak, Appl. Phys. Lett. 80, 2002.
“Catalytic growth of carbon filaments” R. T. K. Baker, Carbon, 27, 315 (1989).
“Patterned growth of individual and multiple vertically aligned carbon nanofibers” V. I. Merkulov, D. H. Lowndes, Y. Y. Wei, G. Eres, and E. Voelkl , Appl. Phys. Lett., 76, 3555 (2000).
“Shaping carbon nanostructures by controlling the synthesis process” V. I. Merkulov, M. A. Guillom, D. H. Lowndes, M. L. Simpson, and E. Voelkl, Appl. Phys. Lett., 79, 1178 (2001).
“Sharpening of carbon nanocone tips during the synthesis process” V. I. Merkulov, A. V. Melechko, M. A. Guillom, D. H. Lowndes, and M. L. Simpson, Chem. Phys. Lett., 350, 381 (2001).
“Controlled alignment of carbon nanofibers in a large-scale synthesis process” V. I. Merkulov, A. V. Melechko, M. A. Guillom, D. H. Lowndes, and M. L. Simpson, Appl. Phys. Lett. 80, 4816 (2002).
“Microfabricated field emission devices using carbon nanofibers as cathode elements” M.A. Guillom, A.V. Melechko, L.R. Baylor, V. I. Merkulov, E.D. Ellis, G.J. Bordonaro, M. L. Simpson and D.H. Lowndes, J. Vac. Sci. Technol. B 19, 2598 (2001).
“Self-aligned gated field emission devices using single carbon nanofiber cathodes” M. A. Guillom, A. V. Melechko, V. I. Merkulov, D. K. Hensley, M. L. Simpson, and D. H. Lowndes, Appl. Phys. Lett. 81, 3660 (2002).
“Individually addressable vertically aligned carbon nanofiber-based electrochemical probes” M.A. Guillom, A.V. Melechko, T.E. McKnight, D.W. Austin, V.I. Merkulov, M.L. Simpson and D.H. Lowndes, J. Appl. Phys. 91, 3824 (2002).
Guillorn Michael A.
Ilic Bojan
Lowndes Douglas H.
Melechko Anatoli V.
Merkulov Vladimir I.
Bruckner PC John
UT-Battelle LLC
Wells Nikita
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