Vertical type semiconductor device and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S220000, C257S328000, C257S329000, C257S334000, C257SE29080

Reexamination Certificate

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11442206

ABSTRACT:
A vertical type semiconductor device includes: a silicon substrate having a first surface and a second surface; a first electrode disposed on the first surface of the silicon substrate; and a second electrode disposed on the second surface of the silicon substrate. Current is capable of flowing between the first electrode and the second electrode in a vertical direction of the silicon substrate. The second surface of the silicon substrate includes a re-crystallized silicon layer. The second electrode includes an aluminum film so that the aluminum film contacts the re-crystallized silicon layer with ohmic contact.

REFERENCES:
patent: 6927167 (2005-08-01), Fukuda et al.
patent: 2004/0080015 (2004-04-01), Mauder et al.
patent: 2004/0171204 (2004-09-01), Slater, Jr. et al.
patent: A-10-163467 (1998-06-01), None
patent: A-2005-19830 (2005-01-01), None

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