Variable speed pump control

Details Variable speed pump control Variable speed pump control

2005-11-22

2005-11-22

Lund, Jeffrie R. (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With measuring, sensing, detection or process control means

C156S345240, C156S345290, C118S715000, C417S044100, C417S042000, C417S053000, C417S423400, C700S121000, C700S275000, C700S282000

Reexamination Certificate

active

06966967

ABSTRACT:
A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.

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