4. Fluid handling
  5. With cleaner, lubrication added to fluid or liquid sealing...
  6. Cleaning or steam sterilizing

Shigeyuki Okura

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Liquid raw material supply unit for vaporizer

Fluid handling – With cleaner – lubrication added to fluid or liquid sealing... – Cleaning or steam sterilizing
Reexamination Certificate

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Vaporizer

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Vaporizing apparatus and semiconductor processing system

Gas and liquid contact apparatus – Contact devices – Atomizer type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3138232

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