4. Coating apparatus
  5. Program, cyclic, or time control
  6. Having prerecorded program medium

Tsuneyuki Okabe

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Film formation apparatus for semiconductor process and...

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Reexamination Certificate

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Fluid control apparatus

Fluid handling – Convertible – Units interchangeable between alternate locations
Reexamination Certificate

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Fluid controller

Fluid handling – With heating or cooling of the system – With electric heating element
Reexamination Certificate

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Heat treating method and heat treating device

Heating – Work chamber having heating means – Work chamber having gaseous material supply or removal...
Reexamination Certificate

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Liquid raw material supply unit for vaporizer

Fluid handling – With cleaner – lubrication added to fluid or liquid sealing... – Cleaning or steam sterilizing
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Profile ID: LFUS-PAI-P-2173855

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