Vapor deposition of parylene-F using 1,4-bis (trifluoromethyl) b

Coating processes – Coating by vapor – gas – or smoke – Organic coating applied by vapor – gas – or smoke

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4272551, 4272552, 4272481, C23C 1600

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active

052682021

ABSTRACT:
A PA-F polymer film is formed using a mixture of 1,4-bis (trifluoromethyl) benzene (TFB) and a halogen initiator. This mixture is provided to a low pressure reactor containing a metal catalyst. The reactor is operated at a sufficient temperature to form a reactive monomer by a chemical reaction at the surface of the catalyst. The reactive monomer is condensed on the surface of a substrate cooled to a temperature sufficiently low to induce polymerization of the reactive monomer to form a PA-F polymer film. In general, the proportion of halogen initiator is about 0.25 to 50% by volume relative to the total volume of the TFB/halogen initiator mixture. The reactor is operated at a temperature of about 200.degree. to 700.degree. C. and a pressure of less than about one torr. In addition, the surface of the substrate is maintained at a temperature of about -30.degree. C. to room temperature. In the preferred approach, the halogen initiator is dibromotetrafluoro-p-xylene (DBX) and the proportion of DBX is about 1 to 5%.

REFERENCES:
patent: 4518623 (1985-05-01), Riley
patent: 5078091 (1992-01-01), Stewart
Chow et al., "Poly (.alpha.,.alpha.,.alpha.',.alpha.'-tetrafluoro-p-xylylene)," Journal of Applied Polymer Science, vol. 13 (1969), pp. 2325-2332.
Gorham, "A New, General Synthetic Method for the Preparation of Linear Poly-p-xylylenes," Journal of Polymer Science: Part A-1, vol. 1 (1966), pp. 3027-3039.
Chow et al., "The Synthese of 1,1,2,2,9,9,10,10-Octafluoro [2.2] paracylophane," The Journal of Organic Chemistry, vol. 35, (Jan. 1970) pp. 20-22.
Hertler, "Substituted Quinodimethans. VI. 7,7,8,8-Tetrafluoroquinodimethan Polymer," The Journal of Organic Chemistry, vol. 28 (Oct. 1963), pp. 2877-2879.

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