4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Lu You

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Antireflective bi-layer hardmask including a densified...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Post imaging radiant energy exposure
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Apparatus and method for manufacturing semiconductors using...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
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Apparatus and method for manufacturing semiconductors using...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Apparatus and methods for uniform scan dispensing of spin-on...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Apparatus for manufacturing planar spin-on films

Coating apparatus – Program – cyclic – or time control
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Profile ID: LFUS-PAI-P-902849

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