4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Toh-Ming Lu

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Atomic layer deposition of cobalt from cobalt metallorganic...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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Deposition of metals on stepped surfaces

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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Enhanced step coverage of thin films on patterned substrates...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate

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Fluorine diffusion barriers for fluorinated dielectrics in...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Increase of deposition rate of vapor deposited polymer by electr

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
Patent

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Profile ID: LFUS-PAI-P-198002

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