Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate
2000-02-17
2001-10-30
Lund, Jeffrie R. (Department: 1763)
Coating apparatus
Gas or vapor deposition
Running length work
Reexamination Certificate
active
06309466
ABSTRACT:
The present invention relates to a vapor-deposition apparatus for vapor deposition of a release agent on a foil or film in a foil-coating system, which has a vaporizer vessel for heating the release agent, and a rotatably disposed, cylindrical drum which has passages on its circumferential surface for conducting the release agent vapor against the foil to be vapor-deposited, where the foil partially wraps around the drum and the drum revolves synchronously with the feed rate of the foil.
A vapor-deposition apparatus of the general type described above is referred to in DE 197 34 477. In the case of the vapor-deposition apparatus shown in FIGS. 6 to 10 of this document, a release agent nozzle connected to the vaporizer vessel is disposed in the interior of the drum immediately inside the inner circumferential surface of the drum. The conveyed release agent flows from this release agent nozzle, through the drum's area covering the release agent nozzle, and against the foil to be vapor-deposited. It is disadvantageous therein, that for the vapor-deposition of the foil, only a very short period of time is available which follows from the width of the nozzle and the feed rate of the foil or the circumferential speed of the drum. Nonetheless, in order to produce a sufficiently thick layer of release agent on the foil, the feed rate of the foil must be chosen relatively small, so that the capacity of the vapor-deposition apparatus is correspondingly small. Furthermore, the sealing of the fixed release agent nozzle with respect to the revolving drum causes difficulties and leads to wear.
An object of the present the invention is to develop a vapor-deposition apparatus of the type mentioned initially such that as high a rate as possible of vapor-deposition can be achieved.
SUMMARY OF THE INVENTION
The above and other objects of the present invention can be achieved according to the invention by the fact that the drum forms a vapor space connected to the vaporizer vessel, and the passages in the circumferential surface of the drum are covered by the wrapping area of the foil and elsewhere the circumferential surface of the drum is covered by a conforming body which runs with a slight spacing along the circumferential surface of the drum to form a narrow gap.
Because a release agent nozzle in the interior of the drum is omitted according to the invention and the drum forms a vapor space, a large area of its circumferential surface is available for the output of the release agent. The foil can thus be vapor-deposited with the release agent over the entire area of the wrapping of the drum and not only in the narrow area of the release agent nozzle as in the case of the apparatus according to DE 197 34 477. In the drum's area not wrapped by the foil, the conforming body ensures that no release agent vapor exits from the drum and contaminates the system in which the vapor-deposition apparatus is disposed. The invention makes it possible to apply a release agent to a foil in exact amounts and with good dimensional stability in order to prevent subsequent metallization in these areas. Since, according to the invention, no separate release agent nozzle is required, the requirement for a seal between such a release agent nozzle and the drum is eliminated.
The drum can be configured in very diverse ways. By way of example, it can be a metal cylinder in which the passages for the release agent vapor are configured in the form of interruptions of the circumferential surface. The drum is particularly economical to produce and permits the formation of different patterns with little expenditure if, according to an advantageous extension of the invention, the drum consists of a porous material which has a thin metallic layer on its outer side and if the passages in the drum are produced by engraving or etching of the metallic layer. In the case of such a drum, the outer metallic layer acts as a mask.
According to another embodiment of the invention, one can prevent the exit of release agent vapor via the gap between the conforming body and the circumferential surface of the drum by the fact that the conforming body has a barrier gas connection connected to the gap between the conforming body and the circumferential surface of the drum.
In order to prevent the condensation of the release agent vapor on the walls of the drum they must as a rule be heated. This can be effected in a particularly economical manner if the conforming body is heated electrically. Such heating requires little expenditure because in the case of the conforming body, in contradistinction to the drum, it is a fixed component, and as the conforming body extends up to just before the outer circumferential surface of the drum, a good transmission of heat by radiation is possible.
The heating of the drum may be effected in a quite particularly economical manner if the conforming body consists of graphite and is heated by a direct flow of current.
The drum has sufficient porosity and can, by way of example, be provided galvanically on its outer circumferential surface with a 10-100 &mgr;m-thick metallic layer of copper, nickel, or chromium, and if the drum consists of carbon reinforced with carbon fibers, can have passages forming the pattern.
If the heat should not reach through the conforming body, then, in the case of such a drum, one can provide additional heating by the drum being heated electrically by direct flow of current from one end face to the other.
An exact temperature regulation of the drum is possible by providing a pyrometer with a slight spacing from the drum.
The introduction of the release agent vapor from the fixed vaporizer vessel in the rotating drum requires little expenditure if, according to another advantageous extension of the invention, the drum, with a hollow shaft at its end, leads into a sealed bearing head connected to the vaporizer vessel.
The vaporizer vessel can have a relatively small volume for the release agent so that the vaporization rate may be changed quickly via the heater capacity if the vaporizer vessel is connected via a secondary filling line and a pressure equalization line to a release agent reservoir.
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patent: 5652022 (1997-07-01), Achtner et al.
patent: 6210487 (2001-04-01), Mueller
patent: 43 11 581 A1 (1994-12-01), None
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patent: 197 34 477 A1 (1998-02-01), None
patent: 01 47 696 A2 (1985-07-01), None
patent: 0 652 302 A1 (1995-05-01), None
Klemm Gunter
Neudert Hans
Leybold Systems GmbH
Lund Jeffrie R.
Smith , Gambrell & Russell, LLP
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