4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus
  6. With means for measuring, testing, or sensing

Leybold Systems GmbH

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Air lock for introducing substrates to and/or removing them...

Coating processes – Coating by vapor – gas – or smoke – Moving the base
Reexamination Certificate

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Air lock for introducing substrates to and/or removing them...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus for coating a substrate with thin layers

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Apparatus for the coating of substrates in a vacuum chamber

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Apparatus for the coating of substrates in a vacuum chamber

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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