Vacuum seal protection in a dielectric break

Details Vacuum seal protection in a dielectric break Vacuum seal protection in a dielectric break

2005-08-09

2005-08-09

Paschall, Mark (Department: 3742)

Electric heating

Metal heating

By arc

C219S121480, C219S121520, C219S121360, C156S345330, C204S298370

Reexamination Certificate

active

06927358

ABSTRACT:
In one aspect of the invention is a method to create a vacuum seal with extended lifetime to form a dielectric break in a vacuum chamber. The method includes the use of an elastic dielectric seal to form a high vacuum seal. It also includes the use of different means to protect the vacuum seal from direct exposure to the plasma and to reactive gases present inside the plasma chamber. Furthermore, it includes the use of elements to ensure a proper compression of the elastic seal, and to avoid its expansion or contraction when the pressures on both sides of the seal are different.

REFERENCES:
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patent: 5690795 (1997-11-01), Rosenstein et al.
patent: 5998933 (1999-12-01), Shun'ko
patent: 6150628 (2000-11-01), Smith et al.
patent: 6388226 (2002-05-01), Smith et al.
patent: 6392351 (2002-05-01), Shun'ko
patent: 6432260 (2002-08-01), Mahoney et al.
patent: 1 087 157 (2001-03-01), None

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