4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Advanced Energy Industries Inc.

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AC powered system for continuous deposition of a cathode...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Adaptive response time closed loop control algorithm

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate

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Adjustable energy quantum thin film plasma processing system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Adjustable energy quantum thin film plasma processing system

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
Patent

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Apparatus and method for fast arc extinction with early...

Electric heating – Metal heating – By arc
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