Vacuum pumping system, driving method thereof, apparatus...

Details Vacuum pumping system, driving method thereof, apparatus... Vacuum pumping system, driving method thereof, apparatus...

2011-01-11

2011-01-11

Fox, Charles A (Department: 3652)

Fluid handling

Systems

With pump

C137S565300, C414S805000

Reexamination Certificate

active

07866341

ABSTRACT:
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.

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