4. Drying and gas or vapor contact with solids
  5. Apparatus
  6. Vacuum

Kouji Nishihata

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Conveying system for a vacuum processing apparatus

Drying and gas or vapor contact with solids – Apparatus – Vacuum
Reexamination Certificate

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Etching end point judging method, etching end point judging...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Low-temperature plasma processor

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Method of and apparatus for supporting rope of crane having arti

Traversing hoists – Having means facilitating assembly or disassembly – Of traversing hoist from support
Patent

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Methods of operating vacuum processing equipment and methods...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-36990

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