Boots – shoes – and leggings
Patent
1995-05-09
1998-09-29
Gordon, Paul P.
Boots, shoes, and leggings
36446828, G06F 1100, G06F 1900
Patent
active
058153969
ABSTRACT:
The present invention relates to vacuum processing equipment for processing a wafer in a vacuum, and film coating or forming equipment and method for forming a film on a wafer wherein radiation measurement and temperature control of the wafer is carried out by using an infrared radiation thermometer. Based upon the radiation measurement, heating and/or cooling of the wafer during processing is carried out.
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Kato Tokio
Kisimoto Satosi
Kobayashi Shigeru
Matsubara Sunao
Nishitani Eisuke
Gordon Paul P.
Hitachi , Ltd.
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