Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Reflective mirror for soft x-ray exposure apparatus
Vacuum processing device and film forming device and method usin
Vacuum processing equipment, film coating equipment and depositi
No associations
LandOfFree
Tokio Kato does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Tokio Kato, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tokio Kato will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-533747