Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate
2008-08-28
2010-11-09
Moore, Karla (Department: 1716)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With workpiece support
C156S345310, C118S719000, C118S7230AN, C118S728000, C118S732000, C414S939000
Reexamination Certificate
active
07828928
ABSTRACT:
A vacuum processing apparatus includes an outer chamber comprising a vacuum container, an inner chamber in which a plasma used for processing a wafer is generated, the inner chamber being detachably disposed inside of the outer chamber, a wafer holder on which the wafer is located is disposed inside of the inner chamber, and an exhausting device disposed below the wafer holder which exhausts the inside of the inner chamber. The inner chamber is sealed in air-tight manner with respect to a space between the inner chamber and the outer chamber while the space is maintained at a vacuum pressure.
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Kihara Hideki
Makino Akitaka
Soraoka Minoru
Takahashi Youji
Tauchi Susumu
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Moore Karla
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