Vacuum processing apparatus

Details Vacuum processing apparatus Vacuum processing apparatus

1993-03-26

1995-02-21

Bueker, Richard

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156345, 4272481, 118715, C23C 1600

Patent

active

053912608

ABSTRACT:
To improve an actual exhaust speed, in a vacuum processing device for processing a work located in a vacuum processing chamber by using a processing gas introduced into the vacuum processing chamber, the vacuum processing device having means for introducing the processing gas into the vacuum processing chamber, means for controlling a gas flow of the processing gas, and means for exhausting the processing gas after the work is processed by the processing gas; the exhausting means comprises an exhaust pump, a buffer space extended in a direction substantially perpendicular to a center of the work with an extended area larger than a size of a suction port of the exhaust pump, and a gas outlet formed on a back side of a surface of the work to be processed, the gas outlet having a size substantially equal to or larger than the size of the suction port of the exhaust pump.

REFERENCES:
patent: 4431473 (1984-02-01), Okano et al.
patent: 5000225 (1991-03-01), Murdoch

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