Expanded – threaded – driven – headed – tool-deformed – or locked-thr – Headed fastener element – Having resilient securing structure on shank
Patent
1996-06-28
1998-08-11
Wilson, Neill R.
Expanded, threaded, driven, headed, tool-deformed, or locked-thr
Headed fastener element
Having resilient securing structure on shank
411 21, 411392, 411913, F16B 1900, F16B 1304
Patent
active
057918503
ABSTRACT:
A vacuum compatible fastener useful for fastening a workpiece. The fastener has a head section at an upper end of the fastener of a first diameter. A shank section extends from the head section and includes a spring or spring-like element which allows the fastener to be stretched and pretensioned. The shank section has a diameter less than the diameter of the head section. A tip section at a lower end of the fastener extends from the shank section. The tip section includes one or more retractable elements having upper ends extending radially outward away from the tip section in the non-retracted state for gripping a sidewall of a workpiece receiving hole. An opening extends along the central axis of the fastener through the head section to the tip section. The fastener minimizes contamination and allows high pumpdown rates in vacuum processing tools such as semiconductor manufacturing process tools.
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Balter Valentine
Mundt Randall S.
Lam Research Corporation
Wilson Neill R.
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