Coating apparatus – Gas or vapor deposition – Work support
Patent
1998-07-17
2000-05-02
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Work support
118500, C23C 1600
Patent
active
060568267
ABSTRACT:
A vacuum coating device coats substrates on all sides by rotating the substrates in a material flow. The device is for use in a vacuum chamber with a material source, and includes a holder for holding the substrates opposite the material source and drives correlated with the holder to bring about a rotation and shifting movement of the substrates. The device includes a hollow manipulator arm formed from three legs which extend at an angle with respect to one another. More specifically, the first leg extends at an obtuse angle with respect to the second leg, and the second leg extends at an approximately right-angle with respect to the third leg. The substrates are then held at the end of the third leg by the holder. The manipulator arm, when driven by a motor, can rotate around the longitudinal axis of the first leg, and, moreover, can move back and forth in the direction of this longitudinal axis. The holder includes a planetary gear system and substrate holders, which are made to rotate by the planetary gear system.
REFERENCES:
patent: 3783822 (1974-01-01), Wollam
patent: 4108107 (1978-08-01), Scheuermann
patent: 4192253 (1980-03-01), Aichert et al.
patent: 5558909 (1996-09-01), Poliquin
Anderle Friedrich
Bahr Martin
Eberhardt Helmut
Rick Alfred
Bueker Richard
Leybold Systems GmbH
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