4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Alfred Rick

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Apparatus for the coating of substrates in a vacuum chamber

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Vacuum coating device for coating substrates on all sides

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vacuum treatment system for application of thin, hard layers

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1559351

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