Vacuum chamber assembly

Details Vacuum chamber assembly Vacuum chamber assembly

2007-01-09

2007-01-09

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

Chamber seal

C118S050000, C277S312000, C277S630000, C277S637000, C220S677000, C220S680000, C220S681000, C049S475100, C049S479100

Reexamination Certificate

active

10807275

ABSTRACT:
A vacuum chamber assembly comprises a floor plate, an upper plate, plural props standing on the floor plate to support the upper plate, and side plates closing side opening portions between the props. First connected portions between the floor plate and the props and second connected portions between the upper plate and the props are fixed by screws. Circumferential edge portions of the side opening portions are provided with installation grooves, respectively. A gasket includes side surface sealing portions installed in the installation grooves formed on the circumferential edge portions of the side opening portions, respectively, and connection sealing portions for sealing the first connected portions and the second connected portions. The side plates are fixed to the circumferential edge portions to close the side opening portions via the side surface sealing portions of the gasket, respectively.

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patent: 02-122824 (1990-05-01), None

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