Coating processes – Measuring – testing – or indicating
Patent
1989-03-27
1991-07-16
Beck, Shrive
Coating processes
Measuring, testing, or indicating
427 10, 427 541, 118708, 118712, 118 501, 118620, B05D 0000, B05D 306, B05C 1100, B05C 1102
Patent
active
050324357
ABSTRACT:
A system for monitoring and controlling the rate of growth of thin films in an atmosphere of reactant gases measures the UV absorbance of the atmosphere and calculates the partial pressure of the gases. The flow of reactant gases is controlled in response to the partial pressure.
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Biefeld Robert M.
Hebner Gregory A.
Killeen Kevin P.
Zuhoski Steven P.
Beck Shrive
Chafin James H.
Moser William R.
Ojanen Karla
Padgett Marianne L.
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