Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1986-02-20
1989-08-01
Childs, Sadie
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 451, 427122, 427249, 427255, 4272551, 4272552, 4272553, 437225, 437234, B05D 306, C23C 1630
Patent
active
048532517
ABSTRACT:
A process for forming a deposited film comprises introducing into a film forming space housing a substrate therein an active species (A) formed by decomposition of a compound containing carbon and a halogen and an active species (B) formed from a chemical substance for film formation which is reactive with said active species (A) separately from each other, then providing them with discharge energy and allowing both the species to react with each other thereby to form a deposited film on the substrate.
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Ishihara Shunichi
Kanai Masahiro
Oda Shunri
Ohno Shigeru
Shimizu Isamu
Canon Kabushiki Kaisha
Childs Sadie
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