Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-12-04
2007-12-04
Whitehead, Jr., Carl (Department: 2813)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S623000, C438S780000, C257S762000
Reexamination Certificate
active
10995925
ABSTRACT:
A method for impregnating the pores of a zeolite low-k dielectric layer with a polymer, and forming an interconnect structure therein, thus mechanically strengthening the dielectric layer and preventing metal deposits within the pores.
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Boyanov Boyan
Goodner Michael D.
Kloster Grant M.
Chen George
Intel Corporation
Jr. Carl Whitehead
Rodgers Colleen E.
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