Using zeolites to improve the mechanical strength of low-k...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S623000, C438S780000, C257S762000

Reexamination Certificate

active

10995925

ABSTRACT:
A method for impregnating the pores of a zeolite low-k dielectric layer with a polymer, and forming an interconnect structure therein, thus mechanically strengthening the dielectric layer and preventing metal deposits within the pores.

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