Using different gate dielectrics with NMOS and PMOS...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C257S369000

Reexamination Certificate

active

07087476

ABSTRACT:
Complementary metal oxide semiconductor integrated circuits may be formed with NMOS and PMOS transistors having different gate dielectrics. The different gate dielectrics may be formed, for example, by a subtractive process. The gate dielectrics may differ in material, thickness, or formation techniques, as a few examples.

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Metz e al., “Using Different Gate Dielectrics with NMOS and PMOS Transistors of a Complementary Metal Oxide Semiconductor Integrated Circuit”, U.S. Appl. No. 10/881,055, Jun. 30, 2004.

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