User interface for wafer data analysis and visualization

Details User interface for wafer data analysis and visualization User interface for wafer data analysis and visualization

2003-05-30

2010-06-15

Carter, Aaron W (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C348S087000, C348S126000, C356S237100

Reexamination Certificate

active

07738693

ABSTRACT:
A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis.

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