User interface for quantifying wafer non-uniformities and...

Details User interface for quantifying wafer non-uniformities and... User interface for quantifying wafer non-uniformities and...

2007-07-03

2007-07-03

Mehta, Bhavesh M (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S173000, C715S716000

Reexamination Certificate

active

10331194

ABSTRACT:
A graphical user interface for controlling analysis of a wafer map is provided. The user interface provides a graphical selection control for selecting a region of the wafer map for statistical analysis. The user interface is configured to generate statistical data for the selected region to complete the statistical analysis. The statistical data is then displayed for the selected region. Re-generation of the statistical data for display is performed upon detecting a change in the selected region.

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