Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1997-07-16
1999-10-26
Niebling, John F.
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438592, 438795, H01L 21336
Patent
active
059727659
ABSTRACT:
Method of forming a film for a semiconductor device in which a source material comprising a deuterated species is provided during formation of the film.
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Clark William F.
Ference Thomas G.
Hook Terence B.
Martin Dale W.
Hack Jonathan
International Business Machines - Corporation
Leas James M.
Niebling John F.
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