Ultraviolet-curable composition and method for patterning the cu

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface

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4302701, 430330, 430919, 4302861, 522 63, 522 99, 522148, G03C 500, C08F 246

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active

058612351

ABSTRACT:
This invention pertains to a curable composition comprising a N-substituted 4-(o-nitrophenyl)dihydropyridine (a compound that generates base under the action of ultraviolet radiation) and a silanol-containing polymer that condenses under the action of the base generated to form a siloxane bond. The compositions of the instant invention cure by exposure to ultraviolet radiation. Cured patterns may be formed from the curable composition by interposing a mask between a film of the said composition and the radiation source during UV exposure, then dissolving and removing the uncured composition to form a pattern, and thereafter heating the residual material. The compositions can be cured by low-strength ultraviolet radiation and produce a highly heat-resistant cured product.

REFERENCES:
patent: 5591783 (1997-01-01), Kobayashi et al.
patent: 5595856 (1997-01-01), Mochizuki et al.
patent: 5616629 (1997-04-01), Nguyen et al.
Jpn. J. Appl. Phys., vol. 32 (1993) pp. 6052-6058, Ito et al. Part I, No. 12B, Dec. 1993.

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