Ultimate analyzer, scanning transmission electron microscope...

Details Ultimate analyzer, scanning transmission electron microscope... Ultimate analyzer, scanning transmission electron microscope...

2005-08-23

2005-08-23

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S305000, C250S306000, C250S310000

Reexamination Certificate

active

06933501

ABSTRACT:
The present invention provides an ultimate analyzer which displays an element distribution image of an object with high contrast and high accuracy. A scanning transmission electron microscope and a method of analyzing elements using the ultimate analyzer is also provided. The ultimate analyzer comprises a scattered electron beam detector for detecting an electron beam scattered by an object; an electron spectrometer for energy dispersing an electron beam transmitted through the object; an electron beam detector for detecting said dispersed electron beam; and a control unit for analyzing elements based on an output signal of the electron beam detected by the electron beam detector and an output signal of the electron beam detected by the scattered electron beam detector.

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