Mold for nano imprinting

Details Mold for nano imprinting Mold for nano imprinting

2005-08-02

2005-08-02

Heckenberg, Donald (Department: 1722)

Plastic and nonmetallic article shaping or treating: processes

Mechanical shaping or molding to form or reform shaped article

Deforming the surface only

C264S337000, C249S115000, C249S135000, C101S028000, C101S483000, C106S038220

Reexamination Certificate

active

06923930

ABSTRACT:
A metal mold for use in a nano-imprinting process comprises a firmly adhering monomolecular non-sticking layer. The layer was obtained by subjecting the mold to a reaction with a fluoroalkyl compound having a mercapto group. As a result of said reaction, the layer comprises an organic sulfide of said metal.

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R.W. Jaszewski et al., Properties of Thin Anti-Adhesive Films Used for the Replication of Microstructures in Polymers, Microelectronic Engineering, vol. 35, pp. 381-384, (1997).

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