Two-dimensional beam deflector

Details Two-dimensional beam deflector Two-dimensional beam deflector

1996-05-13

1998-06-09

Font, Frank G.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356369, 359202, G01B 1106, G02B 2608

Patent

active

057643652

ABSTRACT:
A two dimensional beam deflector is disclosed which deflects beams from multiple optical assemblies. The input of beams of the multiple optical assemblies follow parallel optical paths until deflection to a wafer. An ellipsometer using a two-dimensional beam deflector is also disclosed.

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