Tri-gate field-effect transistors formed by aspect ratio...

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – With lattice constant mismatch

Reexamination Certificate

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C257SE33050, C257SE29246, C257SE29296, C257SE29298, C257SE21092, C257SE21097, C257SE21102, C257SE21133, C257SE21403, C257SE21562, C438S044000, C438S283000, C438S481000

Reexamination Certificate

active

07977706

ABSTRACT:
Semiconductor structures include a trench formed proximate a substrate including a first semiconductor material. A crystalline material including a second semiconductor material lattice mismatched to the first semiconductor material is formed in the trench. Process embodiments include removing a portion of the dielectric layer to expose a side portion of the crystalline material and defining a gate thereover. Defects are reduced by using an aspect ratio trapping approach.

REFERENCES:
patent: 2002/0084000 (2002-07-01), Fitzgerald
patent: 2005/0073028 (2005-04-01), Grant et al.
patent: 2005/0250285 (2005-11-01), Yoon et al.
patent: 02062090 (1990-03-01), None

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