Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – With lattice constant mismatch
Reexamination Certificate
2011-07-12
2011-07-12
Garber, Charles D (Department: 2812)
Active solid-state devices (e.g., transistors, solid-state diode
Heterojunction device
With lattice constant mismatch
C257SE33050, C257SE29246, C257SE29296, C257SE29298, C257SE21092, C257SE21097, C257SE21102, C257SE21133, C257SE21403, C257SE21562, C438S044000, C438S283000, C438S481000
Reexamination Certificate
active
07977706
ABSTRACT:
Semiconductor structures include a trench formed proximate a substrate including a first semiconductor material. A crystalline material including a second semiconductor material lattice mismatched to the first semiconductor material is formed in the trench. Process embodiments include removing a portion of the dielectric layer to expose a side portion of the crystalline material and defining a gate thereover. Defects are reduced by using an aspect ratio trapping approach.
REFERENCES:
patent: 2002/0084000 (2002-07-01), Fitzgerald
patent: 2005/0073028 (2005-04-01), Grant et al.
patent: 2005/0250285 (2005-11-01), Yoon et al.
patent: 02062090 (1990-03-01), None
Abdelaziez Yasser A
Garber Charles D
Slater & Matsil L.L.P.
Taiwan Semiconductor Manufacturing Company , Ltd.
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