Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2005-12-27
2005-12-27
Prenty, Mark V. (Department: 2822)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S273000
Reexamination Certificate
active
06979621
ABSTRACT:
A trench MOSFET device comprising: (a) a silicon substrate of a first conductivity type (preferably N-type conductivity); (b) a silicon epitaxial layer of the first conductivity type over the substrate, the epitaxial layer having a lower majority carrier concentration than the substrate; (c) a body region of a second conductivity type (preferably P-type conductivity) within an upper portion of the epitaxial layer; (d) a trench having trench sidewalls and a trench bottom, which extends into the epitaxial layer from an upper surface of the epitaxial layer and through the body region of the device; (f) an oxide region lining the trench, which comprises a lower segment covering at least the trench bottom and upper segments covering at least upper regions of the trench sidewalls; (g) a conductive region within the trench adjacent the oxide region; and (h) a source region of the first conductivity type within an upper portion of the body region and adjacent the trench. The lower segment of the oxide region is thicker than the upper segments of the oxide region in this embodiment.
REFERENCES:
patent: 5072266 (1991-12-01), Bulucea et al.
patent: 5442214 (1995-08-01), Yang
patent: 5541425 (1996-07-01), Nishihara
patent: 5637898 (1997-06-01), Baliga
patent: 5801417 (1998-09-01), Tsang et al.
patent: 5866931 (1999-02-01), Bulucea et al.
patent: 5907776 (1999-05-01), Hshieh et al.
patent: 6252277 (2001-06-01), Chan et al.
patent: 6262453 (2001-07-01), Hshieh
patent: 6274905 (2001-08-01), Mo
patent: 6388286 (2002-05-01), Baliga
patent: 6404007 (2002-06-01), Mo et al.
patent: 6674124 (2004-01-01), Hshieh et al.
patent: 2001/0000919 (2001-05-01), Kocon
patent: 2001/0028085 (2001-10-01), Blanchard
patent: 05335582 (1993-12-01), None
Tseng, Hsing-Huang et al., “A Robust Gate Dielectric for Submicron Technology,” Semiconductor International, Jul. 1992, pp. 68-72.
Hshieh Fwu-Iuan
So Koon Chong
General Semiconductor Inc.
Mayer Fortkort & Williams PC
Mayer, Esq. Stuart H.
Prenty Mark V.
Williams Esq. Karin L.
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