Transmission electron microscope with camera system

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

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250397, H01J 3726, H01J 3722

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active

057172072

ABSTRACT:
A transmission electron microscope has a camera system that is linked to the optical lens system of the electron microscope by linking the number of electron beam scanning lines of the camera system with the zoom function of the optical lens system. Thus, the number of scanning lines increases as the magnification of the transferred image decreases. Further, the specimen under observation is photographed with a constant number of pixels at all times regardless of the magnification of the transferred image by the optical lens system, thus preventing a reduction in the amount of specimen information.

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G.Y. Fan et al, "High-Sensitivity Lens-Coupled Slow-Scan CCD Camera for Transmission Electron Microscopy", Ultramicroscopy, vol. 52, 1993, pp. 21-28.
Patent Abstracts of Japan, JP6139991, vol. 18, No. 434, May 20, 1994, Hiroyuki et al, Transmittaion Electron Microscope.
Patent Abstracts of Japan, JP6249799, vol. 18, No. 638, Sep. 9, 1994, Takayoshi et al, Quick and Precision Measuring Apparatus for Electron-Beam Diffraction Intensity.
Buggy et al, "Optimization of Post-Specimen Lenses for Use in STEM", Electron Microscopy and Analysis Proceedings, No. 61, Sep. 1981, pp. 197-200.

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