Transmission electron microscope specimen and method of...

Details Transmission electron microscope specimen and method of... Transmission electron microscope specimen and method of...

2007-11-20

2007-11-20

Epps, Georgia (Department: 2878)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C438S033000

Reexamination Certificate

active

11241953

ABSTRACT:
A transmission electron microscope (TEM) specimen and a method of manufacturing the specimen are provided. The specimen comprises an analysis point. The specimen is formed by forming a dimple at a surface portion of the preliminary specimen, and ion milling the preliminary specimen having the dimple.

REFERENCES:
patent: 5892225 (1999-04-01), Okihara
patent: 6184064 (2001-02-01), Jiang et al.
patent: 6538254 (2003-03-01), Tomimatsu et al.
patent: 2004-042215 (2004-02-01), None
patent: 100209658 (1999-04-01), None
patent: 100214551 (1999-05-01), None
patent: 100253320 (2000-01-01), None
patent: 1020030043233 (2003-06-01), None

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