Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2008-09-23
2008-09-23
Tran, Minh-Loan (Department: 2826)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S300000, C438S586000, C438S257000, C438S291000, C257S330000, C257S192000, C257S413000, C257S396000, C257SE29156
Reexamination Certificate
active
11615804
ABSTRACT:
A transistor device includes a recess in a surface of semiconductor substrate, a gate insulation layer formed over an inner side of the recess, a gate conductor filling the recess in which the gate insulation layer is formed, and source and drain regions located over the substrate adjacent the recess. Among the advantages: the gate structure lowers overall gate resistance and reduces the short channel effect.
REFERENCES:
patent: 6303448 (2001-10-01), Chang et al.
patent: 6780732 (2004-08-01), Durcan et al.
patent: 1020000017149 (2000-03-01), None
patent: 2001-0080432 (2001-08-01), None
Ahmed Selim
Dongbu Hitek Co., Ltd.
Sherr & Nourse, PLLC
Tran Minh-Loan
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