Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1991-11-18
1993-08-31
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430162, G03C 1492
Patent
active
052408124
ABSTRACT:
A protective material for use as an overcoating film for acid catalyzed resist compositions comprising a polymeric film forming compound, the films of which are impermeable to vapors of organic and inorganic bases.
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patent: 4940646 (1990-07-01), Pawlowski
Conley Willard E.
Kvitek Richard J.
Kwong Ranee W.
Lang Robert N.
Lyons Christopher F.
Chapman Mark A.
Crockatt Dale M.
International Business Machines - Corporation
McCamish Marion E.
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