Tin oxide, cadmium chloride doped silver chloride electron beam

Details Tin oxide, cadmium chloride doped silver chloride electron beam Tin oxide, cadmium chloride doped silver chloride electron beam

1979-10-22

1981-05-26

Welsh, John D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Electron beam imaging

430270, 430567, 430 5, 346158, 365118, 365127, 365128, G03C 172, G03C 1733

Patent

active

042699347

ABSTRACT:
Electron beam-sensitive films containing silver chloride, cadmium chloride and tin oxide, and the use of such films to provide optical masks by selective film darkening with an electron beam, are described.

REFERENCES:
patent: 3219448 (1965-11-01), Lu Valle et al.
patent: 3664837 (1972-05-01), Stanley
patent: 3852771 (1974-12-01), Ross
Def. Pub., T966,003, Maskasky, 1/3/78.
Photo. Sci. Eng., 11(5), pp. 322-328 (1967), Shepp et al.
Marcus et al., "The Use of Silver Halide Emulsion as a Resist," Internal, Electron Devices Meeting, Wash., D.C. (1978).
Bowden, CRC Critical Reviews in the Solid State Sciences, pp. 223-264, (2/1979).

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